Design & Analysis of Clamped Free MEMS Resonator
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Abstract
This paper presents use of the simple cantilever beam as a Clamped free MEMS resonator, it’s design, Eigen frequency and electrostatic analysis. This resonator requires 4V DC voltage and has a quality factor of 1302.5
DOI: 10.17762/ijritcc2321-8169.1506117
DOI: 10.17762/ijritcc2321-8169.1506117
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How to Cite
, M. .Vijaya V. .Gomase, P. M. V. S. B. (2015). Design & Analysis of Clamped Free MEMS Resonator. International Journal on Recent and Innovation Trends in Computing and Communication, 3(6), 4072–4074. https://doi.org/10.17762/ijritcc.v3i6.4593
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