Design, Simulation of Low Actuation RF MEMS Shunt Switches With Electromagnetic Characterization

Abstract

Micro Electro Mechanical Systems (MEMS) is an integration of sensors, actuators, microstructures and microelectronics. Components of MEMS that comprises of moving sub milli-meter sized parts, capable of providing Radio Frequency (RF) functionality are collectively referred as RF MEMS. In this work, low actuation RF MEMS switches have been designed and simulated and they have also been analysed for electromagnetic characterization. The switches so analyzed show an actuation voltage of as low as 2V. The electromagnetic analysis gives an isolation of as high as 55-65dB and a very low insertion loss of 0.01dB.
DOI: 10.17762/ijritcc2321-8169.150686