Design of Mems Based Tristate Phase Shifter Using COMSOL 4.3b

Abstract

A V - band CMOS - MEMS switchable phase shifter based on reflection - type topology is presented in this work. Phase shifter is simulated by using CMOS process. Three discrete phas e states are achieved at 65GHz by using Bi - directional fishbone actuators. The measured insertion is very less and the return loss is also better than 14 dB over the 55 - 65 GHz frequency range. It demonstrates a great potential in many applications.