, M. .Vijaya V. .Gomase, P. M. V. S. B. Design & Analysis of Clamped Free MEMS Resonator. International Journal on Recent and Innovation Trends in Computing and Communication, [S. l.], v. 3, n. 6, p. 4072–4074, 2015. DOI: 10.17762/ijritcc.v3i6.4593. Disponível em: https://ijritcc.org/index.php/ijritcc/article/view/4593. Acesso em: 1 jul. 2024.