, D. G. N. K. H. S. A. B. . An Inventive Framework of Micro-Electromechanical System (MEMS). International Journal on Recent and Innovation Trends in Computing and Communication, [S. l.], v. 1, n. 4, p. 311–316, 2013. DOI: 10.17762/ijritcc.v1i4.2780. Disponível em: https://ijritcc.org/index.php/ijritcc/article/view/2780. Acesso em: 28 jul. 2024.